Microwave RF devices are widely used in wireless communications and other fields. Especially in the field of civil communications, with the rapid increase in the number of terminal access devices and the increasing demand for larger bandwidth and lower latency wireless networks in terminal applications, 5G millimeter wave and even 6G THz communication technology will play a pivotal role in future wireless communication applications. Microwave RF devices based on GaAs, InP, and GaN materials are the cornerstone of a new generation of communication technology.